Designed and manufactured to support various wet processes and wafer carrier sizes.
The stations can be manual, automatic or semi automatic, and are designed for easy maintenance and with small footprints.
MABAT design the stations according to process requirements and customer needs.
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Full automatic chemical wet station, including the following features:
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Semi automatic chemical wet station, including the following features:
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Manual chemical wet station, including the following features:
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Manual chemical wet station, including chemical process baths, working surface and local sink. Integrating exist customer process equipment. Controlled and monitored by local touch screen. |
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Manual chemical wet station with working surface. Integrating exist customer process equipment. Controlled and monitored by local touch screen. |
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MABAT works in accordance with ISO, ISO 14001 and ISO 9001 standards. As a member of SEMI, all products are designed and manufactured according to SEMI guidelines. The systems are CE marked and has TUV NA approval.
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