Semi automatic chemical wet bench

MABAT’s Semi-Automatic Chemical Wet Bench allows processing Wafers in one process run.
The Wafers are installed in a dedicated cassette mounted on an adapter; using a programmable automatic process the adapter is consecutively carried through process baths.
A robot transfers the adapter between the different chemical baths according to a predetermined chemical recipe.
Only the adapter loading and unloading procedures are performed manually by the Operator.
Each bath in the Semi-Automatic Wet Bench is operated and controlled via a HMI touch screen that displays its status and enables selecting and setting all the necessary parameters for the operation.
Dedicated access doors and panels are provided to facilitate service tasks.
The Automatic Wet Bench is a complete self-contained system with extensive reliability and advanced fault analysis and warning handling.

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