A Safety Module is responsible for handling unintended releases by means of leak detectors and Delta Pressure Switch Limiters (DPSL).
The leak detectors and DPSL outputs are connected to a Safety PLC.
In an unintended release event (e.g. internal chemical spillage), the leak detector and/or DPSL signals the Safety PLC who in turn, alerts the operator and according to the Facility Safety Policy, may completely shutdown the system.
Each system is equipped with waste evacuation capabilities. The waste materials are evacuated to the facility waste drain or to dedicated systems such as the Mabat CDU-1000 Waste Accumulation System.
The common intended releases may include but are not limited to:
- Used chemical solutions.
- Processed waste accumulated in buffer tanks.
- Contaminated DI water.
- Neutralization solutions.
- Contaminated N2 (evacuated via the scrubbers).