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Wet Bench

Designed and manufactured to support various wet processes and wafer carrier sizes.
The stations can be manual, automatic or semi automatic, and are designed for easy maintenance and with small footprints.
MABAT design the stations according to process requirements and customer needs.
 


 
     Automatic wet bench, chemical process line, robotic system
  • Each bath can hold 1 cassette of wafers
  • Moving between baths is done automatic by robot
  • Software can hold several recipes
  • The system includes load and unload baths
  • The robot is controlled by the main PLC and HMI
  • Each bath has local operator touch screen in the upper panel (for bath control, programing and operation)
  Automatic wet bench, process line, robotic system
  • 2 process baths one per chemical. Each bath has position for 2 cassettes 
  • Load and unload provide with motion system and automatic window
  • Moving between baths is automatic by robot
  • The software can hold unlimited recipes
  • load and unload provide from one side
 
Full automatic chemical wet station          

Full automatic chemical wet bench, including the following features:

  • Temperature controlled circulation loop
  • Automatic robotic arm for process handling, horizontal movement
  • Local control and operation systems
 
Semi automatic chemical wet station
  Semi automatic chemical wet bench, including the following features:
  • Automatic robotic arm for process handling, horizontal and vertical movement
  • Local control and operation systems
 
Manual chemical wet station
  Manual chemical wet bench, including the following features:
  • Automatic robotic arm for process handling, horizontal and vertical movement
  • Local control and operation systems
  • Process bath agitation

Manual chemical wet station
  Manual chemical wet bench, including chemical process baths, working surface and local sink.
Integrating exist customer process equipment.
Controlled and monitored by local touch screen.
 
Manual chemical wet station
  Manual chemical wet bench, with working surface.
Integrating exist customer process equipment.
Controlled and monitored by local touch screen.
 

MABAT works in accordance with ISO, ISO 14001 and ISO 9001 standards. As a member of SEMI, all products are designed and manufactured according to SEMI guidelines. The systems are CE marked and has TUV NA approval.

Designed and manufactured to support various wet processes and wafer carrier sizes.
Israel Main office: +972 (0) 8-660-1320 UK Marketing and support: +44-777-566-3714  USA Toll free: + 1 866-908-6297
    Design:  karagoulla
טוחן מדיה - בניית אתרים